Tetrakis(trimethylsilyloxy)silane
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| Identifiers | |
|---|---|
| Abbreviations | TTMS |
| Properties | |
| C12H36O4Si5 | |
| Molar mass | 384.84 g·mol−1 |
| Appearance | Colourless liquid |
| Density | 0.87 g cm−3 |
| Melting point | −60 °C (−76 °F; 213 K) |
| Boiling point | 103–106 °C (217–223 °F; 376–379 K) |
| Vapor pressure | 8.96 Pa (25°C) |
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Refractive index (nD)
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1.389 |
| Hazards | |
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EU classification (DSD) (outdated)
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 Xi |
| Related compounds | |
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Related compounds
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Hexamethyldisiloxane |
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Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).
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 (what is   ?) |
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| Infobox references | |
Tetrakis(trimethylsilyloxy)silane (TTMS) is an organosilicon compound with the formula Si[OSi(CH3)3]4. This colourless liquid is used as a reagent in organic synthesis.
TTMS can be used for thin film coating with a nanostructured silicon dioxide prepared by plasma-enhanced chemical vapor deposition (PECVD) at atmospheric pressure.
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