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| Identifiers | |||
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3D model (Jmol)
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| ChemSpider | |||
| ECHA InfoCard | 100.012.366 | ||
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| Properties | |||
| C3H10Si | |||
| Molar mass | 74.20 g·mol−1 | ||
| Density | 0.638 g cm−3 | ||
| Melting point | −135.9 °C (−212.6 °F; 137.2 K) | ||
| Boiling point | 6.7 °C (44.1 °F; 279.8 K) | ||
| Hazards | |||
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EU classification (DSD) (outdated)
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| R-phrases (outdated) | R12, R36/37/38 | ||
| S-phrases (outdated) | S9, S16, S26, S33 | ||
| NFPA 704 | |||
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Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).
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| Infobox references | |||
Trimethylsilane or trimethylsilyl hydride, is a compound with the formula C3H10Si, or with the structural formula (CH3)3SiH. It is very flammable. Trimethylsilane is used in the semi-conductor industry as an etchant in the plasma phase.